An interchangeable-cathode vacuum arc plasma source.

Chopping effect observed at cathodic arc initiation

Chopping of current and induction of high voltage spikes has been observed at the rising edge of cathodic vacuum arcs. It is argued that current chopping at the rising edge is similar to the current chopping effect that is well-know for the arc current approaching current-zero. Current chopping can generate high voltage spikes, and thus cathodic arc equipment should be protected against voltage...

Temporal development of ion beam mean charge state in pulsed vacuum arc ion sources.

Vacuum arc ion sources, commonly also known as "Mevva" ion sources, are used to generate intense pulsed metal ion beams. It is known that the mean charge state of the ion beam lies between 1 and 4, depending on cathode material, arc current, arc pulse duration, presence or absence of magnetic field at the cathode, as well as background gas pressure. A characteristic of the vacuum arc ion beam i...

Ion Source Development and Operation

A new vacuum arc type ion source (VARIS) has been developed and tested for high current uranium operation. Figure 1 shows a cross sectional view of the ion source. The discharge arrangement has a tubular anode opposite to the cathode mount carrying 17 cathodes (each one is 5.7mm in diameter and 17mm in length). The anode, made of stainless steel, is placed 15mm apart from the cathode. Its apert...

Vacuum arc plasma generation and thin film deposition from a TiB2 cathode

Method and apparatus for automatically re-igniting vacuum arc plasma source

An apparatus and method are disclosed whereby if the arc in a DC or long-pulse AC vacuum arc plasma process (eg in vacuum deposition) starts to extinguish, this is automatically detected and a reignition process is activated. Detection of a tendency for the arc to extinguish is detected by monitoring the main power supply voltage, which will increase if the arc is extinguished. References Cited...